Microelectromechanical Systems and Devices-2010kaiser

Size 37.146 MB   1 seeders     Added 2012-12-01 07:00:45

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Microelectromechanical Systems and Devices-2010kaiser
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The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS.

Title: Microelectromechanical Systems and Devices
Author: Nazmul Islam
Publisher: InTech
Year: 2012
Format: PDF


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Microelectromechanical_Systems_and_Devices.pdf 37.145 MB
README.nfo 1.042 KB
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